Blank Cover Image

Low Resistance Ti-Si-C Ohmic Contacts for 4H-SiC Power Devices Using Laser Annealing

Author(s):
Publication title:
Silicon Carbide and Related Materials 2016
Title of ser.:
Materials science forum
Ser. no.:
897
Pub. Year:
2017
Page(from):
399
Page(to):
402
Pages:
4
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9783035710434 [3035710430]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Low Resistance Ohmic Contact Formation on 4H-SiC C-Face with NbNi Silicidation Using Nanosecond Laser Annealing

M. de Silva, S. Ishikawa, T. Kikkawa, S.I. Kuroki

Trans Tech Publications
7 Conference Proceedings Pt/Ti LOW RESISTANCE NON-ALLYED OHMIC CONTACTS TO InP-BASED PHOTONIC DEVICES

Katz, A., Chu, S. N. G., Thomas, P. M, Dautremont-Smith, W. C.

Materials Research Society
2 Conference Proceedings Low Resistance Ohmic Contact Formation of Ni Silicide on Partially Si Ion Implanted n+ 4H-SiC

M. de Silva, T. Sato, S.I. Kuroki, T. Kikkawa

Trans Tech Publications
8 Conference Proceedings Formation and Thermal Stability of Ni/Wsi/Ti/Pt Composite Ohmic Contacts to n-SiC for High Power Device Applications

Cole, M.W., Joshi, P.C., Hubbard, C.W., Demaree, D.J., Wood, M.C., Ervin, M.H., Ren, F.

Electrochemical Society
3 Conference Proceedings 4H-SiC nMOSFETs with As-Doped S/D and NbNi Silicide Ohmic Contacts

H. Nagatsuma, S.I. Kuroki, M. de Silva, S. Ishikawa, T. Maeda

Trans Tech Publications
9 Conference Proceedings W, WSix and Ti/Al Low Resistance Ohmic Contacts to InGaN, InN and InAlN

Vartuli, C. B., Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., Shul, R. J., Zolper, J. C., Lovejoy, M. L., Baca, A. …

MRS - Materials Research Society
4 Conference Proceedings Enhanced-Oxidation and Interface Modification on 4H-SiC(0001) Substrate Using Alkaline Earth Metal

K. Muraoka, H. Sezaki, S. Ishikawa, T. Maeda, T. Sato, T. Kikkawa, S.I. Kuroki

Trans Tech Publications
10 Conference Proceedings Characterization of 4H-SiC nMOSFETs in Harsh Environments, High-Temperature and High Gamma-Ray Radiation

S.I. Kuroki, H. Nagatsuma, M. de Silva, S. Ishikawa, T. Maeda

Trans Tech Publications
5 Conference Proceedings 4H-SiC Pseudo-CMOS Logic Inverters for Harsh Environment Electronics

S.I. Kuroki, T. Kurose, H. Nagatsuma, S. Ishikawa, T. Maeda, H. Sezaki, T. Kikkawa, T. Makino, T. Ohshima, M. Östling, …

Trans Tech Publications
11 Conference Proceedings Low Resistance Ohmic Contacts to n-SiC Using Niobium

Oder, T. N., Williams, J. R., Bryant, K. W., Bozack, M. J., Crofton, J.

Trans Tech Publications
6 Conference Proceedings Photosensitive porous low-k interlayer dielectric film

Kuroki, S. -I., Kikkawa, T.

SPIE - The International Society of Optical Engineering
12 Conference Proceedings Characterization of Ti/Al Ohmic Contacts to p-Type 4H-SiC Using Cathodoluminescence and Auger Electron Spectroscopies

Gao, M., Tumakha, S.P., Onishi, T., Tsukimoto, S., Murakami, M., Brillson, L.J.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12