Production and Characterization of Carbon Thin Films by the Magnetron Sputtering Technique

Production and Characterization of Carbon Thin Films by the Magnetron Sputtering Technique

Author(s):

Publication title:

The 59th Brazilian Ceramic Conference

Title of ser.:

Materials science forum

Ser. no.:

881

Pub. Year:

2017

Page(from):

471

Page(to):

474

Pages:

4

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9783035711158 [3035711151]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00066553
Series ID:	PA00000012
Conf. info. (Name):	Brazilian Ceramic Conference (CBC59)
Conf. info. (Number):	59th
Conf. info. (Venue):	Brazil
Conf. info. (Date):	2015.05.17-2015.05.20
Note for article:	59th Brazilian Ceramic Conference (CBC59), 17-20 May, 2015

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