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High accuracy 65nm OPC verification: full process window model vs. critical failure ORC

Author(s):
Amandine Borjon
Jerome Belledent
Shumay D. Shang
Olivier Toublan
Corinne Miramond
Kyle Patterson
Kevin Lucas
Christophe Couderc
Yves Rody
Frank Sundermann
Jean-Christophe Urbani
Stanislas Baron
Yorick Trouiller
Patrick Schiavone
9 more
Publication title:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
Pub. Year:
2005
Pt.:
2
Page(from):
1190
Page(to):
1201
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
Language:
English
Call no.:
P63600/5754
Type:
Conference Proceedings

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