A methodology to calibrate line-end gauge position for better modeling performance

A methodology to calibrate line-end gauge position for better modeling performance

Author(s):

Publication title:

Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5754

Pub. Year:

2005

Pt.:

2

Page(from):

1138

Page(to):

1146

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457349 [0819457345]

Language:

English

Call no.:

P63600/5754

Type:

Conference Proceedings

Details

TDL ID:	ZA00014979
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Advances in resist technology and processing
Conf. info. (Number):	2005 : 18th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.03.01-2005.03.04
Note for article:	18th Optical microlithography,1-4 March, 2005, San Jose, California, USA

Similar Items:

1 Conference Proceedings 101b. Multiscale Stochastic Dynamical Models Calibrated from AFM Single-Molecule Time Series and Computer Simulations Christopher P. Calderon, Ching-Hwa Kiang, Dennis D. Cox, Nolan C. Harris, Wei-Hung ChEn American Institute of Chemical Engineers	7 Conference Proceedings Experimental Method to Evaluate Unbalance Vibration for Machine Tool Spindle Integrated with Automatic Balancer Fan, Hong Wei, Jing, Min Qing, Liu, Heng Trans Tech Publications
2 Conference Proceedings A Novel Small-Size Coupled-Line Wilkinson Power Divider for Dual-Band Applications Wang, Wei Min, Liu, Yuan An Trans Tech Publications	8 Conference Proceedings (534f) Performance Evaluation of Accelerated Carbonation of Basic Oxygen Furnace Slag Via a Rotating Packed Bed: Modeling, Analysis and Maximization Shu-Yuan Pan, Pen-Chi Chiang, Yi-Hung Chen, E-E Chang, Chung-Sung Tan American Institute of Chemical Engineers
3 Conference Proceedings Physical Rehabilitation Assistant System Based on Kinect Liu, Tsun Te, Hsieh, Ching Tang, Chung, Ruei Chi, Wang, Yuan Sheng Trans Tech Publications	9 Conference Proceedings (534f) Performance Evaluation of Accelerated Carbonation of Basic Oxygen Furnace Slag Via a Rotating Packed Bed: Modeling, Analysis and Maximization Shu-Yuan Pan, Pen-Chi Chiang, Yi-Hung Chen, E-E Chang, Chung-Sung Tan American Institute of Chemical Engineers
4 Conference Proceedings Diagnostics of Inductive-Coupled Ch2f2/Cf4 Plasma Using Langmuir Probe and Quadruple Mass Spectrometry Ta-Chin Wei, Chi-Hung Liu American Institute of Chemical Engineers	10 Conference Proceedings (534f) Performance Evaluation of Accelerated Carbonation of Basic Oxygen Furnace Slag Via a Rotating Packed Bed: Modeling, Analysis and Maximization Shu-Yuan Pan, Pen-Chi Chiang, Yi-Hung Chen, E-E Chang, Chung-Sung Tan American Institute of Chemical Engineers
5 Conference Proceedings Electroencephalographic Study of Essential Oils for Stress Relief Liu, Chien Wei, Wang, Ching Sung, Chuang, Kai Jen, Lo, Chia Chi, Chen, Chien Tsu Trans Tech Publications	11 Conference Proceedings (534f) Performance Evaluation of Accelerated Carbonation of Basic Oxygen Furnace Slag Via a Rotating Packed Bed: Modeling, Analysis and Maximization Shu-Yuan Pan, Pen-Chi Chiang, Yi-Hung Chen, E-E Chang, Chung-Sung Tan American Institute of Chemical Engineers
6 Conference Proceedings 731e. Systematic Investigation of the Nucleation Mechanism of Lysozyme Crystallization In the Liquid-Liquid Co-Existence Region Yingxin Liu, Xiujuan Wang, Chi Bun Ching American Institute of Chemical Engineers	12 Conference Proceedings (534f) Performance Evaluation of Accelerated Carbonation of Basic Oxygen Furnace Slag Via a Rotating Packed Bed: Modeling, Analysis and Maximization Shu-Yuan Pan, Pen-Chi Chiang, Yi-Hung Chen, E-E Chang, Chung-Sung Tan American Institute of Chemical Engineers

1

2

3

4

5

6

7

8

9

10

11

12