Mask polarization effects in hyper NA systems

Mask polarization effects in hyper NA systems

Author(s):

Publication title:

Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5754

Pub. Year:

2005

Pt.:

2

Page(from):

1128

Page(to):

1137

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457349 [0819457345]

Language:

English

Call no.:

P63600/5754

Type:

Conference Proceedings

Details

TDL ID:	ZA00014979
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Advances in resist technology and processing
Conf. info. (Number):	2005 : 18th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.03.01-2005.03.04
Note for article:	18th Optical microlithography,1-4 March, 2005, San Jose, California, USA

Similar Items:

1 Conference Proceedings Determination of mask induced polarization effects occurring in hyper NA immersion lithography Huang, W. C., Lai, C. M., Luo, B., Tsai, C. K., Tsay, C. S., Lai, C. W., Kuo, C. C., Liu, R. G., Lin, H. T., Lin, B. J. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Liquid immersion lithography at 157 nm Chen, C.-K., Gau, T.-S., Shiu, L.-H., Lin, B. J. SPIE - The International Society of Optical Engineering
2 Conference Proceedings Cell Planning for Base Station in Mobile Communication Using an Improved Genetic Algorithm Liao, Hung Jen, Lin, Chun Hung Richard, Tung, Kuang Yuan, Lin, Ying Chih, Tsai, Cheng Fa Trans Tech Publications	8 Conference Proceedings Study of line edge roughness using continuous wavelet transform for 65-nm node Shiu, L.-H., Chen, C.-K., Gau, T.-S., Lin, B.-J. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Study of mask corner rounding effects on lithographic patterning for 90-nm technology node and beyond Chou, S.-Y., Shin, J.-J., Shu, K.-C., You, J.-W., Shiu, L.-H., Chang, B.-C., Gau, T.-S., Lin, B.J. SPIE - The International Society of Optical Engineering	9 Conference Proceedings The Development of Building Materials Recommendation System Based on Collaborative Filtering Kuang, Guo Fang, Kuang, Chun Lin Trans Tech Publications
4 Conference Proceedings Performance Evaluation of a Hadoop-Based Secure Cloud Platform Lin, Chun Hung Richard, Liao, Hung Jen, Tung, Kuang Yuan, Lin, Ying Chih, Cheng, Sheng Lun Trans Tech Publications	10 Conference Proceedings Application of the Hilbert-Huang Transform and Enhanced Noise Filtering to the Damage Detection of Structural Systems Jeng-Wen Lin, Hung-Jen Chen, Chong-Shien Tsai American Society of Mechanical Engineers
5 Conference Proceedings Immersion defect reduction, part I: analysis of water leaks in an immersion scanner F. Liang, H. Chang, L. Shiu, C. Chen, L. Chen, T. Gau, B. J. Lin SPIE - The International Society of Optical Engineering	11 Conference Proceedings Mask error tensor and causality of mask error enhancement for low-k1 imaging: theory and experiments Chen, C.-K., Gau, T.-S., Shin, J.-J., Liu, R.-G., Yu. S.-S., Yen, A., Lin, B.J. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Immersion defect reduction, part II: the formation mechanism and reduction of patterned defects L. Shiu, F. Liang, H. Chang, C. Chen, L. Chen, T. Gau, B. J. Lin SPIE - The International Society of Optical Engineering	12 Conference Proceedings The Blade Strength and the Dynamic Characteristics of High Speed Micro-Turbines Jao Hwa Kuang, Hsuan-Sheng Chen, Tsung-Pin Hung American Society of Mechanical Engineers

1

2

3

4

5

6

7

8

9

10

11

12