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Assessing the impact of atomic oxygen in the damage threshold and stress of Hafnia films grown by ion beam sputter deposition

Author(s):
D. Patel
Y. Wang
M. Larotonda
J. Lovewell
J. Jensen
K.J. Hsiao
E. Krous
J.J. Rocca
C.S. Menoni
F. Tomasel
S. Kholi
P. McCurdy
7 more
Publication title:
38th Annual Boulder Damage Symposium : proceedings : laser-induced damage in optical materials, 2006 : 25-27 September, 2006, Boulder, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6403
Pub. Year:
2007
Paper no.:
640314
Page(from):
640314-1
Page(to):
640314-8
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465016 [0819465011]
Language:
English
Call no.:
P63600/6403
Type:
Conference Proceedings

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