Equilibrium water uptake and diffusion behavior in model polynorbornene photoresist polymers

Equilibrium water uptake and diffusion behavior in model polynorbornene photoresist polymers

Author(s):

Publication title:

Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5753(2)

Pub. Year:

2005

Pt.:

2

Page(from):

851

Page(to):

861

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457332 [0819457337]

Language:

English

Call no.:

P63600/5753-2

Type:

Conference Proceedings

Details

TDL ID:	ZA00014978
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Advances in resist technology and processing
Conf. info. (Number):	2005 : 22th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.02.28-2005.03.02
Note for article:	22th Symposium on Advances in resist technology and processing, 28 February-2 March, 2005, San Jose, California, USA

Similar Items:

1 Conference Proceedings 26a. Diffusion, Mass Uptake, and Free Volume Behavior of Polymer Thin and Ultra-Thin Films Richard Lawson, Peter J. Ludovice, Clifford L. Henderson American Institute of Chemical Engineers	7 Conference Proceedings Dissolution behavior of bis-trifluoromethyl-carbinol-substituted polynorbornenes Hoskins, T., Chung, W.J., Ludovice, P.J., Henderson, C.L., Seger, L.D., Rhodes, L.F., Shick, R.A. SPIE-The International Society for Optical Engineering
2 Conference Proceedings (17c) Probing and Understanding the Diffusion Behavior in Polymer Thin Films Annapoorani Sundaramoorthi, Clifford L. Henderson, Peter Ludovice American Institute of Chemical Engineers	8 Conference Proceedings Effect of Thin Film Confinement on the Transport Properties of Ultra-Thin Polymer Films Singh, Lovejeet, Ludovice, Peter J., Henderson, Clifford L. Materials Research Society
3 Conference Proceedings (17c) Probing and Understanding the Diffusion Behavior in Polymer Thin Films Annapoorani Sundaramoorthi, Clifford L. Henderson, Peter Ludovice American Institute of Chemical Engineers	9 Conference Proceedings Characterization of property variation in ultra-thin polymer films from molecular simulation Lovejeet Singh, Clifford L. Henderson, Peter J. Ludovice SPIE - The International Society of Optical Engineering
4 Conference Proceedings 471d. The Diffusion Behavior of Polymer Ultrathin Films: Fundamental Insights and Molecular Weight Effects Clifford L. Henderson, Peter Ludovice, Lovejeet Singh, Ivan Ordaz American Institute of Chemical Engineers	10 Conference Proceedings (751e) Tuning the Domain Size of Block Copolymers for Directed Self-Assembly Using Polymer Blending Richard A. Lawson, Andrew Peters, Peter J. Ludovice, Clifford L. Henderson American Institute of Chemical Engineers
5 Conference Proceedings 187d. Effect of Free Volume Distribution on Transport and Dissolution Properties of Polymers Derrick Callander, Trevor Hoskins, Clifford Henderson, Peter Ludovice, Y.C. Jean American Institute of Chemical Engineers	11 Conference Proceedings (751e) Tuning the Domain Size of Block Copolymers for Directed Self-Assembly Using Polymer Blending Richard A. Lawson, Andrew Peters, Peter J. Ludovice, Clifford L. Henderson American Institute of Chemical Engineers
6 Conference Proceedings Effect of nanoscale confinement on the diffusion behavior of photoresist polymer thin films Singh, L., Ludovice, P.J., Henderson, C.L. SPIE - The International Society of Optical Engineering	12 Conference Proceedings Effect of photoacid generator additives on the dissolution behavior of bis-trifluoromethyl carbinol substituted polynorbornene Hoskins, T., Berger, C.M., Ludovice, P.J., Henderson, C.L., Seger, L.D., Chang, C., Rhodes, L.F. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12