A Novel Process for Planarizing CVD-Diamond Substrates for MCM Application
- Author(s):
- Publication title:
- 1995 International Conference on Multichip Modules : proceedings : 19-21 April 1995, Denver, Colorado
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2575
- Pub. Year:
- 1995
- Page(from):
- 140
- Page(to):
- 145
- Pages:
- 6
- Pub. info.:
- Bellingham, WA: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780930815424 [0930815424]
- Language:
- English
- Call no.:
- P63600/2575
- Type:
- Conference Proceedings
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