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CVD silicon carbide mirrors for EUV applications

Author(s):
Publication title:
Silicon carbide materials for optics and precision structures : 12-13 July 1995 San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2543
Pub. Year:
1995
Page(from):
173
Page(to):
179
Pages:
7
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819419026 [0819419028]
Language:
English
Call no.:
P63600/2543
Type:
Conference Proceedings

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