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Aspheric surface figuring of silicon using plasma-assisted chemical etching

Author(s):
Publication title:
Optomechanical and precision instrument design : 10-11 July 1995, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2542
Pub. Year:
1995
Page(from):
231
Page(to):
235
Pages:
5
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819419019 [081941901X]
Language:
English
Call no.:
P63600/2542
Type:
Conference Proceedings

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