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Extreme ultraviolet scatter from particulate-contaminated mirrors

Author(s):
Publication title:
Optical scattering in the optics, semiconductor, and computer disk industries : 13-14 July 1995, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2541
Pub. Year:
1995
Page(from):
174
Page(to):
186
Pages:
13
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819419002 [0819419001]
Language:
English
Call no.:
P63600/2541
Type:
Conference Proceedings

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