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Technology, characterization, and applications of adaptive mirrors fabricated with IC-compatible micromachining

Author(s):
Publication title:
Adaptive optical systems and applications : 10-11 July 1995, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2534
Pub. Year:
1995
Page(from):
116
Page(to):
129
Pages:
14
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819418937 [0819418935]
Language:
English
Call no.:
P63600/2534
Type:
Conference Proceedings

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