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Fabrication of multilayer optics by sputtering: application to EUV optics with greater than 30% normal reflectance

Author(s):
Publication title:
X-ray and extreme ultraviolet optics : 9-11 July 1995, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2515
Pub. Year:
1995
Page(from):
576
Page(to):
581
Pages:
6
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819418746 [0819418749]
Language:
English
Call no.:
P63600/2515
Type:
Conference Proceedings

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