State of the art in focused ion-beam mask repair systems

State of the art in focused ion-beam mask repair systems

Author(s):

Publication title:

Photomask and X-ray mask technology II : 20-21 April 1995, Kawasaki City, Kanagawa, Japan

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2512

Pub. Year:

1995

Page(from):

398

Page(to):

411

Pages:

14

Pub. info.:

Bellingham, WA: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819418708 [0819418706]

Language:

English

Call no.:

P63600/2512

Type:

Conference Proceedings

Details

TDL ID:	ZA00057714
Series ID:	PA00000029
Conf. info. (Name):	Symposium on photomask and X-ray mask technology
Conf. info. (Number):	2nd
Conf. info. (Venue):	Kawasaki, Japan
Conf. info. (Date):	1995.04.20-1995.04.21
Note for article:	2nd Symposium on photomask and X-ray mask technology, April 20-21, 1995, Kawasaki, Japan. 2512-54

Similar Items:

1 Conference Proceedings Focused ion beam deposition of new materials: dielectric films for device modification and mask repair, and tantalum films for x-ray mask repair D.K. Stewart, A.F. Doyle, J.D. Casey Society of Photo-optical Instrumentation Engineers	7 Conference Proceedings 0.35-ｦﾌm i-line attenuated phase-shift mask(PSM)repair by focused-ion-beam technology Raphaelian,M.L., Ellis,M., Ferranti,D.C., Stewart,D.K. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Chemically enhanced focused-ion-beam(FIB)repair of opaque defects on chrome photomasks Casey,J.D.,Jr., Doyle,A.F., Stewart,D.K., Ferranti,D.C. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Application of mask simulation to mask repair Musil, C.R., Stewart, D.K., Clark, R.F. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Current focused-ion-beam repair strategies for opaque defects and clear defects on advanced phase-shifting masks Raphaelian,M.L., Casey,J.d., Doyle,A.F., Ferranti,D.C., Morgan,J.C. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Repair and printability study of binary chrome masks with OPC features for 0.18-ｦﾌm technology node Stewart,D.K., Ferranti,D.C., Morgan,J.C., Lessing,J., Kuo,J., Chiu,C.S.G. SPIE - The International Society for Optical Engineering
4 Conference Proceedings Focused ion beam (FIB) repair of embedded shifter masks J.C. Morgan, D.C. Ferranti, C. Pennelli, A. Saxonis, W.C. Joyce Society of Photo-optical Instrumentation Engineers	10 Conference Proceedings Recent progress in repair accuracy of the focused ion-beam mask repair system Aita,K., Yasaka,A., Kitamura,T., Matsumura,H., Satoh,Y., Nakamura,H., Fujikawa,J., Tsuchiya,K., Noguchi,S. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Edge-placement accuracy of opaque and clear defect repairs using focused ion beam technology Raphaelian,M.L., Carolan,D., Casey,J.D.,Jr., Doyle,A.F., Ellis,M., Ferranti,D.C., Lessing,J., Rose,K., Stewart,D.K., … SPIE-The International Society for Optical Engineering	11 Conference Proceedings Gas flow modeling for focused ion beam (FIB) repair processes El-Morsi, M. S., Wei, A. C., Nellis, G. F., Engelstad, R. L., Sijbrandij, S., Stewart, D., Mulders, H. SPIE - The International Society of Optical Engineering
6 Conference Proceedings Chemically enhanced FIB repair of opaque defects on molybdenum silicide photomasks Casey,J.D.,Jr., Doyle,A.F., Stewart,D.K., Ferranti,D.C., Raphaelian,M.L., Morgan,J.C. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Advancements in focused ion-beam repair of MoSiON phase-shifting masks Lessing, J., Ferranti, D. C., Sundaram, G., Nagal, L., Verbeek, M. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12