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Micro-Structuring with Excimer Lasers and Reduction of Deposited Ablation Products Using a Special Gas Nozzle with a Vacuum System

Author(s):
Publication title:
ICALEO '94 : Laser Materials Processing : 17-20 October 1994, Orlando, Florida
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2500
Pub. Year:
1994
Page(from):
333
Page(to):
342
Pages:
10
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780912035529 [0912035528]
Language:
English
Call no.:
P63600/2500
Type:
Conference Proceedings

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