Micromachined sensor and actuator research at the Microelectronics Development Laboratory

Micromachined sensor and actuator research at the Microelectronics Development Laboratory

Author(s):

Publication title:

Smart structures and materials 1995 : Smart electronics : 2-3 March 1995, San Diego, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2448

Pub. Year:

1995

Page(from):

152

Page(to):

157

Pages:

6

Pub. info.:

Bellingham, WA: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819417978 [0819417971]

Language:

English

Call no.:

P63600/2448

Type:

Conference Proceedings

Details

TDL ID:	ZA00057651
Series ID:	PA00000029
Conf. info. (Name):	Symposium on smart structures and materials
Conf. info. (Number):	1995
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	1995.03.02-1995.03.03
Note for article:	1995 Symposium on smart structures and materials, March 2-3, 1995, San Diego, CA, USA. 2448-16

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