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Precision position-control of piezoelectric actuators using charge feedback

Author(s):
Publication title:
Smart structures and materials 1995 : smart materials
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2441
Pub. Year:
1995
Page(from):
243
Page(to):
255
Pages:
13
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417909 [0819417904]
Language:
English
Call no.:
P63600/2441
Type:
Conference Proceedings

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