In-situ optimization of an i-line optical projection lens

In-situ optimization of an i-line optical projection lens

Author(s):: C. Huang
Publication title:: Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 2440
Pub. Year:: 1995
Page(from):: 734
Page(to):: 742
Pages:: 9
Pub. info.:: Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:: 0277786X
ISBN:: 9780819417886 [0819417882]
Language:: English
Call no.:: P63600/2440
Type:: Conference Proceedings

Details

TDL ID:	ZA00057643
Series ID:	PA00000029
Conf. info. (Name):	Symposium on optical/laser microlithography
Conf. info. (Number):	8th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1995.02.22-1995.02.24
Note for article:	8th Symposium on optical/laser microlithography, February 22-24, 1995, Santa Clara, CA, USA. 2440-65

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