Blank Cover Image

Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers

Author(s):
Publication title:
Laser-induced damage in optical materials, 1994 : 26th Annual Boulder Damage Symposium, proceedings, 24-26, October, 1994, Boulder, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2428
Pub. Year:
1995
Page(from):
400
Page(to):
409
Pages:
10
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417763 [0819417769]
Language:
English
Call no.:
P63600/2428
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Influence of the number of double layers on the damage threshold of Al2O3/SiO2 and LaF3/MgF2 mirrors at 248 nm

Eva,E., Mann,K.R., Schallenberg,U.B., Kaiser,N., Henking,R., Ristau,D.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings High-resolution calorimetric absorption measurements on optical components for excimer lasers

Eva,E., Mann,K.R.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings ArF radiation resistance of optical coatings on CaF2 in relation to the surface finish of the substrate

Thielsch,R., Heber,J., Duparre,A., Kaiser,N., Mann,K.R., Eva,E.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings Coated optics for DUV excimer laser applications

Ullmann,J., Mertin,M., Lauth,H., Bernitzki,H., Mann,K.R., Ristau,D., Arens,W., Thielsch,R., Kaiser,N.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Stability of optical interference coatings exposed to low-fluence 193-nm ArF radiation

Heber,J., Thielsch,R., Blaschke,H., Kaiser,N., Mann,K.R., Eva,E., Leinhos,U., Gortler,A.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Characterizing the absorption and aging behavior of DUV optical material by high-resolution excimer laser calorimetry

Mann,K.R., Eva,E.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Multiple-pulse damage thresholds of optical components for excimer lasers

Mann,K.R., Granitza,B., Eva,E.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Characterization of absorption and scatter losses on optical components for ArF excimer lasers

Mann,K.R., Apel,O., Eva,E.

SPIE - The International Society for Optical Engineering
5 Conference Proceedings Characterization of absorption and degradation on optical components for high-power excimer lasers

Mann,K.R., Eva,E., Granitza,B.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Surface finish and optical quality of CaF2 for UV lithography applications

Duparre,A., Thielsch,R., Kaiser,N., Jakobs,S., Mann,K.R., Eva,E.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Properties of fluoride DUV excimer laser optics:influence of the number of dielectric layers

Arens,W., Ristau,D., Ullmann,J., Zaczek,C., Thielsch,R., Kaiser,N., Duparre,A., Apel,O., Mann,K.R., Lauth,H., …

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Characterization of excimer laser beam parameters

Mann,K.R., Ohlenbusch,J., Westphal,V.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12