Fabrication of microlens array for the IR by lithographic processes using an inorganic chalcogenide photoresist
- Author(s):
- Publication title:
- 9th Meeting on Optical Engineering in Israel : 24-26 October, 1994, Tel-Aviv, Israel
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2426
- Pub. Year:
- 1995
- Page(from):
- 235
- Page(to):
- 241
- Pages:
- 7
- Pub. info.:
- Bellingham, WA: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819417749 [0819417742]
- Language:
- English
- Call no.:
- P63600/2426
- Type:
- Conference Proceedings
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