New excimer ultraviolet sources for photo-assisted deposition of thin films: an alternative to excimer-laser-induced deposition

New excimer ultraviolet sources for photo-assisted deposition of thin films: an alternative to excimer-laser-induced deposition

Author(s):

Publication title:

Laser-induced thin film processing : 8-10 February 1995, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2403

Pub. Year:

1995

Page(from):

290

Page(to):

301

Pages:

12

Pub. info.:

Bellingham, WA: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819417503 [0819417505]

Language:

English

Call no.:

P63600/2403

Type:

Conference Proceedings

Details

TDL ID:	ZA00057606
Series ID:	PA00000029
Conf. info. (Name):	Symposium on laser-induced thin film processing
Conf. info. (Number):	1994
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	1995.02.08-1995.02.10
Note for article:	1994 Symposium on laser-induced thin film processing, February 8-10, 1995, San Jose, CA, USA. 2403-23

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