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Precision and performance of polysilicon micromirrors for hybrid integrated optics

Author(s):
Publication title:
Micro-optics/micromechanics and laser scanning and shaping : 7-9 February 1995, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2383
Pub. Year:
1995
Page(from):
99
Page(to):
109
Pages:
11
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417305 [0819417300]
Language:
English
Call no.:
P63600/2383
Type:
Conference Proceedings

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