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Microstress in high-pressure temperature-treated Czochralski-grown silicon with oxygen concentration up to 1.2 x 1018 cm-3

Author(s):
A. Misiuk  
Publication title:
Solid state crystals, materials science and applications : 23-27 October 1994, Zakopane, Poland
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2373
Pub. Year:
1995
Page(from):
335
Page(to):
340
Pages:
6
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417206 [0819417203]
Language:
English
Call no.:
P63600/2373
Type:
Conference Proceedings

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