Blank Cover Image

Anomalous damage behavior of BF2+ implantation in silicon

Author(s):
Publication title:
Second International Conference on Thin Film Physics and Applications : '94 TFPA : 15-17 April 1994, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2364
Pub. Year:
1994
Page(from):
137
Page(to):
141
Pages:
5
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417084 [0819417084]
Language:
English
Call no.:
P63600/2364
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings * SILICON ON INSULATOR FORMED BY 0+ OR N+ ION IMPLANTATION

Hemment, P.L.F.

Materials Research Society
7 Conference Proceedings DOSE DEPENCE OF DEFECTS IN SILICON PRODUCED BY HIGH DOSE,HIGH TEMPERATURE 0+ IMPLANTATION.

HOBBS,A., BARKLIE,R.C., REESON,K., HEMMENT,P.L.F.

Trans Tech Publications
2 Conference Proceedings The Impact of Different Alkali Metal Ions on Photoluminescence Properties of Ca10M(PO4)7:Eu2+ (M: Li, Na, K)

J.W. Zhao, J. Dong, J. Zhou, X.Q. Wen, S.Z. Yang, L.S. Luo, D. Wu, W.W. Liu, H.Q. Xiao, Y.C. Zhou, Y.Y. Xiao, F. Yang

Trans Tech Publications
8 Conference Proceedings Effects of Mg2+ Doping on the Properties of LiFePO4 Synthesized via Hydrothermal Route

G.C. Liang, X.K. Zhi, X.Q. Ou, L. Wang

Trans Tech Publications
3 Conference Proceedings High-Frequency Ferromagnetic Properties of Nanocrystalline (Co2FeSi)1-x(Al2O3)x Heusler Alloy Films with …

X.Q. Cao, S.D. Li, Z.Y. Cai, H.L. Du, Q. Xue

Trans Tech Publications
9 Conference Proceedings Preparation and Photocatalytic Property of SO42-/TiO2, SO42-/Fe2O3 Nano-Particles

X.M. Lv, Y. Jia, Z.Y. Huang, Q.L. Han, S.J. Zhang

Trans Tech Publications
4 Conference Proceedings RBS STUDIES OF DAMAGE BEHAVIOR IN SILICON INDUCED BY P2+ IMPLANTATION

Genqing, Yang, Chenglu, Lin, Ziwei, Fang, Zuyao, Zhou, Shichang, Zou

Materials Research Society
10 Conference Proceedings High Plastic Ti66Nb13Cu8Ni6.8Al6.2 Composites with In Situ β-Ti Phase Synthesized by Spark …

Y.Y. Li, C. Yang, W.P. Chen, X.Q. Li, S.G. Qu

Trans Tech Publications
5 Conference Proceedings Gettering of Cu to voids induced by H+ implantation in SIMOX substrate

Zhang, M., Lin, C., Hemment, P.L.F., Gutjahr, K., Goesele, U.

Electrochemical Society
11 Conference Proceedings Formation and characterization of double SIMOX structures by sequential high and low energy oxygen implantation into silicon

Hatzopoulos, N., Siapkas, D.I., Hemment, P.L.F., Skorupa, W.

Electrochemical Society
6 Conference Proceedings High-Frequency Performance of Co2FeAl Half-Metallic Films Prepared by Oblique Sputtering under Various Deposition Conditions

Z.Y. Cai, S.D. Li, X.Q. Cao, H.L. Du, Q. Xue

Trans Tech Publications
12 Conference Proceedings The SOI odyssey

Hemment, P.L.F.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12