Calibration of optical probe instruments for the measurement of surface microtopography

Calibration of optical probe instruments for the measurement of surface microtopography

Author(s):

Publication title:

Industrial optical sensors for metrology and inspection : 31 October-1 November 1994, Boston, Massachusetts

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2349

Pub. Year:

1995

Page(from):

136

Page(to):

147

Pages:

12

Pub. info.:

Bellingham, WA: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819416841 [0819416843]

Language:

English

Call no.:

P63600/2349

Type:

Conference Proceedings

Details

TDL ID:	ZA00057552
Series ID:	PA00000029
Conf. info. (Name):	Symposium on industrial optical sensors for metrology and inspection
Conf. info. (Number):	1994
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1994.10.31-1994.11.01
Note for article:	1994 Symposium on industrial optical sensors for metrology and inspection, October 31 - November 1, 1994, Boston, MA, USA. 2349-17

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