Copper interconnection schemes: elimination of the need of diffusion barrier/adhesion promoter by the use of corrosion-resistant low-resistivity-doped copper
- Author(s):
- Publication title:
- Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2335
- Pub. Year:
- 1994
- Page(from):
- 80
- Page(to):
- 90
- Pages:
- 11
- Pub. info.:
- Bellingham, WA: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819416681 [0819416681]
- Language:
- English
- Call no.:
- P63600/2335
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
INTERACTIONS OF COPPER WITH INTERLAYER DIELECTRICS AND ADHESION PROMOTERS/DIFFUSION BARRIERS
Materials Research Society |
7
Conference Proceedings
Optimization of the Chemical Mechanical Planarization Process to Build Multilevel Copper Interconnection Structures
Electrochemical Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
9
Conference Proceedings
Oxidation Resistant Dilute Copper (Boron) Alloy Films Prepared by DC-Magnetron Cosputtering
MRS - Materials Research Society |
MRS - Materials Research Society |
10
Conference Proceedings
Oxidation Resistant Dilute Copper (Boron) Alloy Films Prepared by DC-Magnetron Cosputtering
MRS - Materials Research Society |
Materials Research Society |
11
Conference Proceedings
INTERMETALLIC REACTIONS BETWEEN COPPER AND MAGNESIUM AS AN ADHESION/BARRIER LAYER
Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |