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Nondestructive method for visualization of free carrier accumulation in standard semiconductors wafers

Author(s):
Publication title:
Second International Symposium on Advanced Laser Technologies : 8-13 November 1993, Prague, Czech Republic
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2332
Pub. Year:
1994
Page(from):
138
Page(to):
145
Pages:
8
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819416650 [0819416657]
Language:
English
Call no.:
P63600/2332
Type:
Conference Proceedings

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