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(45d) Topographically Selective Deposition of Dielectrics Using Ion Implantation

Author(s):
Publication title:
Materials Engineering and Sciences Division 2016 : Core Programming Area at the 2016 AIChE Annual Meeting : San Francisco, California, USA, 13-18 November 2016
Title of ser.:
AIChE Conference Proceedings
Ser. no.:
2016
Pub. Year:
2016
Pt.:
1
Page(from):
134
Page(to):
134
Pages:
1
Pub. info.:
New York: American Institute of Chemical Engineers
ISBN:
9781510834408 [1510834400]
Language:
English
Call no.:
A08000/2016 [CD-ROM]
Type:
Conference Proceedings

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