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(600b) iCVD Top-Coat for Sub-10nm Patterning with Directed Self-Assembly of Block Copolymer Film

Author(s):
Publication title:
Nanoscale Science and Engineering Forum 2015 : Core Programming Area at the 2015 AIChE Annual Meeting : Salt Lake City, Utah, USA, 8-13 November 2015
Title of ser.:
AIChE Conference Proceedings
Ser. no.:
2015
Pub. Year:
2015
Page(from):
307
Page(to):
307
Pages:
1
Pub. info.:
New York: American Institute of Chemical Engineers
ISBN:
9781510818668 [1510818669]
Language:
English
Call no.:
A08000/2015 [CD-ROM]
Type:
Conference Proceedings

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