(587d) Robust Virtual Metrology of Plasma Etch Tools Using Growing Structure Multiple Models Systems with Dynamic Partial Least Squares Models
- Author(s):
- Publication title:
- Computing and Systems Technology Division 2014 : Core Programming Area at the 2014 AIChE Annual Meeting : Atlanta, Georgia, USA, 16-21 November 2014
- Title of ser.:
- AIChE Conference Proceedings
- Ser. no.:
- 2014
- Pub. Year:
- 2014
- Pt.:
- 2
- Page(from):
- 1038
- Page(to):
- 1038
- Pages:
- 1
- Pub. info.:
- New York: American Institute of Chemical Engineers
- ISBN:
- 9781510812550 [1510812555]
- Language:
- English
- Call no.:
- A08000/2014 [CD-ROM]
- Type:
- Conference Proceedings
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