(530e) Initiated Chemical Vapor Deposition of Polymer Thin Films for Photolithography Applications
- Author(s):
- Publication title:
- 2011 AIChE annual meeting, October 16-21, Minneapolis Convention Center, Minneapolis, MN : conference proceedings : Non-topical conferences
- Title of ser.:
- AIChE Conference Proceedings
- Ser. no.:
- P-267
- Pub. Year:
- 2011
- Pt.:
- Materials Engineering & Sciences Division
- Pub. info.:
- New York: American Institute of Chemical Engineers
- ISBN:
- 9780816910700 [0816910707]
- Language:
- English
- Call no.:
- A08000/2011 [CD-ROM]
- Type:
- Conference Proceedings
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