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310d. 3-Dimensional Monte Carlo Profile Simulation and Experimental Measurements of Surface Roughness Under Plasma Etching

Author(s):
Publication title:
AIChE annual meeting, Philadelphia 100 : conference proceedings : 1908 to 2008 : 2008 AIChE annual meeting, Philadelphia, PA, November 16-21, 2008. Non-topical conferences
Title of ser.:
AIChE Conference Proceedings
Ser. no.:
P-255
Pub. Year:
2008
Pt.:
8
Page(from):
P138891
Pages:
7
Pub. info.:
New York: American Institute of Chemical Engineers
ISBN:
9780816910502 [0816910502]
Language:
English
Call no.:
A08000/2008 [CD-ROM]
Type:
Conference Proceedings

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