368e. Nonlinear Model Identification for Temperature Control in a Single Wafer Rapid Thermal Processing
- Author(s):
- Publication title:
- 2007 AIChE annual meeting : Salt Palace Convention Center, Salt Lake City, Utah, November 4-9, 2007 : conference proceedings. Non-Topical Conference
- Title of ser.:
- AIChE Conference Proceedings
- Ser. no.:
- P-246
- Pub. Year:
- 2007
- Pt.:
- 10
- Page(from):
- P97589
- Pub. info.:
- New York: American Institute of Chemical Engineers
- ISBN:
- 9780816910229 [0816910227]
- Language:
- English
- Call no.:
- A08000/2007 [CD-ROM]
- Type:
- Conference Proceedings
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