375a. Using High Fidelity Simulation in the Design of Experiments for Optimizing Etch Uniformity in Plasma Etching Reactors

375a. Using High Fidelity Simulation in the Design of Experiments for Optimizing Etch Uniformity in Plasma Etching Reactors

Author(s):

Publication title:

2005 annual meeting & fall showcase : '05 AIChE, Oct 30 - Nov 4 : conference proceedings, Cincinnati Convention Center, Cincinnati, OH : non-topical presentation records : 10. Computing and Systems Technology Division

Title of ser.:

AIChE Conference Proceedings

Ser. no.:

P-221(2)

Pub. Year:

2005

Pages:

1

Pub. info.:

New York: American Institute of Chemical Engineers

ISBN:

9780816909964 [0816909962]

Language:

English

Call no.:

A08000/2005 [CD-ROM]

Type:

Conference Proceedings

Details

TDL ID:	ZA00061201
Series ID:	PA00000008
Conf. info. (Name):	AIChE Annual Meeting
Conf. info. (Number):	2005
Conf. info. (Venue):	Cincinnati, OH, USA
Conf. info. (Date):	2005.10.30-2005.11.04
Note for article:	AIChE 2005 Annual Meeting, Oct 30-Nov 4, Cincinnati, OH

Similar Items:

1 Conference Proceedings Building Non-Parametric Models for Rsm: a Bayesian Approach and Its Application to Plasma Etching Nirmal Tatavalli Mittadar, Michael Nikolaou, Demetre J. Economou American Institute of Chemical Engineers	7 Conference Proceedings 240d. Design of Experiments for Identification of Multivariable Models Satisfying Integral Controllability: The Dynamic Model Case Mark Darby, Michael Nikolaou American Institute of Chemical Engineers
2 Conference Proceedings 56a. Past and Future of Modeling and Simulation for Plasma Processing Demetre J. Economou American Institute of Chemical Engineers	8 Conference Proceedings Plasma Etch Reactor Simulation for Improved Optimization and Control Singh, V., Rhinehart, R.R. American Institute of Chemical Engineers
3 Technical Paper Simulations of dielectric etch in high density plasmas reactors Johannes, Justine, Meeks, Ellen, Bartel, Timothy, Hebner, Greg, Miller, Paul, Economou, Demetre, Feldsein, John, Dalton, … American Institute of Aeronautics and Astronautics	9 Conference Proceedings Simulation of Etch Stop in High Density Plasma Reactor Yang, M., Gang, Y., Ambrose, Tom Electrochemical Society
4 Conference Proceedings Parametric Study of Plasma Uniformity in a Dome-Shaped Inductively Coupled Plasma Reactor Economou, D.J., Feldsien, J. Electrochemical Society	10 Conference Proceedings (434d) Optimizing the Logistics of Compressed Natural Gas Transportation by Marine Vessels Michael Nikolaou, Michael J. Economides American Institute of Chemical Engineers
5 Conference Proceedings 143i. Design of Experiments for Multivariable Systems Subject to Integral Controllability Mark Darby, Michael Nikolaou American Institute of Chemical Engineers	11 Conference Proceedings Utilization of Optical Emission Spectroscopy in Characterization of Microwave Plasma Anna-Marie Weed, Vincent M. Donnelly, Demetre J. Economou, Vladimir Samara American Institute of Chemical Engineers
6 Conference Proceedings (698b) Design of Constrained Experiments for Identification of Multivariable Fir Models Mark Darby, Michael Nikolaou American Institute of Chemical Engineers	12 Conference Proceedings Etch Induced Damage in High Density Inductively Coupled Plasma Etching Reactor Zhong, W., Misra, D., Bartynski, R.A., Patel, V., Singh, B. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12