Immersion Lithography: Moving Microlithography to Nanolithography

Immersion Lithography: Moving Microlithography to Nanolithography

Author(s):

Publication title:

Coupling Theory, Molecular Simulations and Computations Chemistry to the Physical World

Title of ser.:

AIChE Conference Proceedings

Ser. no.:

P-213(T6)

Pub. Year:

2004

Page(from):

51e

Pages:

6

Pub. info.:

New York: American Institute of Chemical Engineers

ISBN:

9780816909650 [0816909652]

Language:

English

Call no.:

A08000/2004 [CD-ROM]

Type:

Conference Proceedings

Details

TDL ID:	ZA00061163
Series ID:	PA00000008
Conf. info. (Name):	AIChE Annual Meeting
Conf. info. (Number):	2004
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	2004.11.07-2004.11.12
Note for article:	AIChE Annual Meeting, November 7-12, 2004, Austin, Texas

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