Smooth 4H-SiC Epilayers Grown with High Growth Rates with Silane/Propane Chemistry Using 4° Off-Cut Substrates
- Author(s):
- Publication title:
- Silicon Carbide and Related Materials 2015 : [ICSCRM 2015] : selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy
- Title of ser.:
- Materials science forum
- Ser. no.:
- 858
- Pub. Year:
- 2016
- Page(from):
- 209
- Page(to):
- 212
- Pages:
- 4
- Pub. info.:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9783035710427 [3035710422]
- Language:
- English
- Call no.:
- M23650 [v.858]
- Type:
- Conference Proceedings
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