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Effect of Assisted-Ion-Beam Gases on the Structure of Amorphous Silicon Thin Films Prepared by Ion-Beam-Assisted Sputtering

Author(s):
Publication title:
Functional Materials Research : selected, peer reviewed papers from the China Functional Material Technology and Industry Forum CFMTIF 2015, October 30th - Novemnber 1th, 2015
Title of ser.:
Materials science forum
Ser. no.:
852
Pub. Year:
2016
Pt.:
2
Page(from):
1102
Page(to):
1107
Pages:
6
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9783038357551 [3038357553]
Language:
English
Call no.:
M23650 [v.852]
Type:
Conference Proceedings

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