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Numerical Simulation of Polysilicon Chemical Vapor Deposition in Siemens Reactor

Author(s):
Publication title:
Applied Materials and Technologies : Selected, peer reviewed papers from the 9th International Forum on Advanced Material Science and Technology (IFAMST9), November 30 - December 3, 2014, Xiamen, China
Title of ser.:
Materials science forum
Ser. no.:
833
Pub. Year:
2015
Page(from):
107
Page(to):
111
Pages:
5
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9783038355960 [3038355968]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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