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Micro/Nano Surface Texturing in Si Using UV Femtosecond Laser Pulses

Author(s):
Publication title:
Applied electromagnetic engineering for magnetic, superconducting, multifunctional and nano materials : selected peer reviewed papers from the 8th Japanese-Mediterranean Workshop on Applied Electromagnetic Engineering for Magnetic, Superconducting, Multifunctional and Nano Materials June 23-26 2013, Athen[s], Greece
Title of ser.:
Materials science forum
Ser. no.:
792
Pub. Year:
2014
Page(from):
39
Page(to):
46
Pages:
8
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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