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Pattern Transfer of 23-Nm-Diameter Block Copolymer Self-Assembled Nanodots Using CF4 Etching with Carbon Hard Mask (CHM) as Mask

Author(s):
Publication title:
Nanotechnology applications in energy and environment : selected peer reviewed papers from the proceedings of Symposium on Nanotechnology Applications in Energy and Environment 2012 (NAEE2012) 20-21 September 2012, Bandung, Indonesia
Title of ser.:
Materials science forum
Ser. no.:
737
Pub. Year:
2013
Page(from):
133
Page(to):
136
Pages:
4
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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