Epitaxial Growth, Mechanical, Electrical Properties of SiC/Si and SiC/Poli-Si

Epitaxial Growth, Mechanical, Electrical Properties of SiC/Si and SiC/Poli-Si

Author(s):

Publication title:

Silicon carbide and related materials 2011 : selected, peer reviewed papers from the 14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA

Title of ser.:

Materials science forum

Ser. no.:

717-720

Pub. Year:

2012

Pt.:

2

Page(from):

897

Page(to):

900

Pages:

4

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00054207
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011)
Conf. info. (Number):	14th
Conf. info. (Venue):	Cleveland, Ohio, USA
Conf. info. (Date):	2011.09.11-2011.09.16
Note for article:	14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA

Similar Items:

1 Conference Proceedings SiC Epitaxial Growth on Si(100) Substrates Using Carbon Tetrabromide G. Attolini, M. Bosi, F. Rossi, B.E. Watts, G. Salviati Trans Tech Publications	7 Conference Proceedings Buffer Layer Optimization for the Growth of State of the Art 3C-SiC/Si M. Bosi, G. Attolini, M. Negri, C. Frigeri, E. Buffagni Trans Tech Publications
2 Conference Proceedings The Influence of C₃H₈ and CBr₄ on Structural and Morphological Properties of 3C-SiC Layers G. Attolini, M. Bosi, B.E. Watts, G. Battistig, L. Dobos Trans Tech Publications	8 Conference Proceedings Selective β-SiC/SiO₂ Core-Shell NW Growth on Patterned Silicon Substrate G. Attolini, F. Rossi, F. Fabbri, G. Salviati, M. Bosi Trans Tech Publications
3 Conference Proceedings TEM and SEM-CL Studies of SiC Nanowires F. Rossi, F. Fabbri, G. Attolini, M. Bosi, B.E. Watts Trans Tech Publications	9 Conference Proceedings Structural Characterization of 3C-SiC Grown Using Methyltrichlorosilane M. Bosi, G. Attolini, B. Pécz, Z. Zolnai, L. Dobos Trans Tech Publications
4 Conference Proceedings β-SiC NWs Grown on Patterned and MEMS Silicon Substrates B.E. Watts, G. Attolini, F. Rossi, M. Bosi, G. Salviati Trans Tech Publications	10 Conference Proceedings Emission Enhancement of SiC/SiO₂ Core/Shell Nanowires Induced by the Oxide Shell F. Fabbri, F. Rossi, G. Attolini, M. Bosi, G. Salviati Trans Tech Publications
5 Conference Proceedings Evaluation of Curvature and Stress in 3C-SiC Grown on Differently Oriented Si Substrates B.E. Watts, G. Attolini, T. Besagni, M. Bosi, C. Ferrari Trans Tech Publications	11 Conference Proceedings Plasma Treatment of 3C-SiC Surfaces G. Attolini, P.M. Rotonda, C. Cornelissen, M. Mazzera, M. Bosi Trans Tech Publications
6 Conference Proceedings A Comparative Study of the Morphology of 3C-SiC Grown at Different C/Si Ratios G. Attolini, B.E. Watts, M. Bosi, F. Rossi, F. Riesz Trans Tech Publications	12 Conference Proceedings SiC NWs Grown on Silicon Substrate Using Fe as Catalyst P. Lagonegro, M. Bosi, G. Attolini, M. Negri, S.C. Dhanabalan Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12