Blank Cover Image

Micro-Raman Analysis of a Micromachined 3C-SiC Cantilever

Author(s):
Publication title:
Silicon carbide and related materials 2011 : selected, peer reviewed papers from the 14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA
Title of ser.:
Materials science forum
Ser. no.:
717-720
Pub. Year:
2012
Pt.:
1
Page(from):
525
Page(to):
528
Pages:
4
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application

R. Anzalone, G. D'Arrigo, M. Camarda, N. Piluso, A. Severino

Trans Tech Publications
7 Conference Proceedings Raman Characterization of Doped 3C-SiC/Si for Different Silicon Substrates and C/Si Ratios

N. Piluso, A. Severino, M. Camarda, R. Anzalone, A. Canino

Trans Tech Publications
2 Conference Proceedings Strain Evaluation and Fracture Properties of Hetero-Epitaxial Single Crystal 3C-SiC Squared Membrane

R. Anzalone, G. D'Arrigo, M. Camarda, N. Piluso, F. La Via

Trans Tech Publications
8 Conference Proceedings Strain Field Analysis of 3C-SiC Free-Standing Microstructures by Micro-Raman and Theoretical Modelling

M. Camarda, N. Piluso, R. Anzalone, A. La Magna, F. La Via

Trans Tech Publications
3 Conference Proceedings Evaluation of Mechanical and Optical Properties of Hetero-Epitaxial Single Crystal 3C-SiC Squared-Membrane

R. Anzalone, G. D'Arrigo, M. Camarda, N. Piluso, F. La Via

Trans Tech Publications
9 Conference Proceedings Analysis on 3C-SiC Layer Grown on Pseudomorphic-Si/Si1-xGex/Si(001) Heterostructures

N. Piluso, M. Camarda, R. Anzalone, A. Severino, S. Scalese

Trans Tech Publications
4 Conference Proceedings Advanced Stress Analysis by Micro-Structures Realization on High Quality Hetero-Epitaxial 3C-SiC for MEMS Application

R. Anzalone, M. Camarda, G. D'Arrigo, C. Locke, A. Canino

Trans Tech Publications
10 Conference Proceedings 4H-SiC Defects Analysis by Micro Raman Spectroscopy

N. Piluso, M. Camarda, R. Anzalone, F. La Via

Trans Tech Publications
5 Conference Proceedings Stress Relaxation Study in 3C-SiC Microstructures by Micro-Raman Analysis and Finite Element Modeling

N. Piluso, R. Anzalone, A. Severino, A. Canino, A. La Magna

Trans Tech Publications
11 Conference Proceedings Structural Characterization of Heteroepitaxial 3C-SiC

A. Severino, R. Anzalone, M. Camarda, N. Piluso, F. La Via

Trans Tech Publications
6 Conference Proceedings Raman Stress Characterization of Hetero-Epitaxial 3C-SiC Free Standing Structures

N. Piluso, M. Camarda, R. Anzalone, A. Severino, A. La Magna

Trans Tech Publications
12 Conference Proceedings 3C-SiC Heteroepitaxial Growth on Inverted Silicon Pyramids (ISP)

G. D'Arrigo, A. Severino, G. Milazzo, C. Bongiorno, N. Piluso

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12