The Effect of Target to Substrate Distance on the Properties of HAZO Films Deposited by Magnetron Sputtering

The Effect of Target to Substrate Distance on the Properties of HAZO Films Deposited by Magnetron Sputtering

Author(s):

Publication title:

Energy, environment and biological materials : selected, peer reviewed papers from 11th IUMRS International Conference in Asia (IUMRS-ICA 2010), 25-28 September 2010, Qingdao, China

Title of ser.:

Materials science forum

Ser. no.:

685

Pub. Year:

2011

Page(from):

134

Page(to):

140

Pages:

7

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00054182
Series ID:	PA00000012
Conf. info. (Name):	IUMRS International Conference in Asia (IUMRS-ICA 2010)
Conf. info. (Number):	11th
Conf. info. (Venue):	Qingdao, China
Conf. info. (Date):	2010.09.25-2010.09.28
Note for article:	11th IUMRS International Conference in Asia (IUMRS-ICA 2010), 25-28 September 2010, Qingdao, China

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