Synthetic Properties of the c-Axis Tilted AlN Thin Films
- Author(s):
- Publication title:
- PRICM 7 : selected peer review papers from the seventh Pacific Rim International Conference on Advanced Materials and Processing, August 2-6, 2010, Cairns, Australia
- Title of ser.:
- Materials science forum
- Ser. no.:
- 654-656
- Pub. Year:
- 2010
- Pt.:
- 2
- Page(from):
- 1780
- Page(to):
- 1783
- Pages:
- 4
- Pub. info.:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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