Blank Cover Image

Research on Influence of Ion-Assisted Deposition to the Optical and Mechanical Properties of SiO2 Film

Author(s):
Publication title:
PRICM 7 : selected peer review papers from the seventh Pacific Rim International Conference on Advanced Materials and Processing, August 2-6, 2010, Cairns, Australia
Title of ser.:
Materials science forum
Ser. no.:
654-656
Pub. Year:
2010
Pt.:
2
Page(from):
1720
Page(to):
1723
Pages:
4
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Correlation between mechanical stress and optical properties of SiO2/Ta2O3 multilayer UV narrow-bandpass filters deposited by plasma ion-assisted deposition …

Wang, J., Maier, R. L.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Effect of Heat-Treatment on the Microstructure and Properties of SiO2-TiO2 Aerogels Synthesized via Supercritical Drying

Y.G. Jiang, Y.Q. Qin, J.Z. Feng, J. Feng, L. Xu

Trans Tech Publications
2 Conference Proceedings MECHANICAL AND OPTICAL PROPERTIES OF THIN FILMS OF TANTALUM OXIDE DEPOSITED BY ION-ASSISTED DEPOSITION

Martin, P. J., Bendavid, A., Swain, M. V., Netterfield, R. P., Kinder, T. J., Sainty, W. G., Drage, D.

MRS - Materials Research Society
8 Conference Proceedings Rapid Thermal Chemical Vapor Deposition of Polycrystalline Silicon-Germanium Films on SiO2 and Their Properties

Li, V. Z-Q, Mirabedini, M. R., Kuehn, R. T., Gladden, D., Batchelor, D., Christenson, K., Wortman, J. J., Ozturk, M. C., …

MRS - Materials Research Society
3 Conference Proceedings Characterization of ion-implanted SiO2 properties applicable to laser processing

Teng, T.C., Shiau, Y., Chen, Y.S., Skinner, C., Peng, J.D., Palkuti, L.J.

North Holland
9 Conference Proceedings Synthesis and Mechanical Properties of Niobium Films by Ion Beam Assisted Deposition

Ji, H., Was, G. S., Jones, J. W.

MRS - Materials Research Society
4 Conference Proceedings Ion-Beam-Assisted Deposition of Metal Nanocluster Thin Films with Nonlinear Optical Properties

Cotell, C. M., Carosella, C. A., Flom, S. R., Schiestel, S., Haralampus, N., Barnett, T. W., Bartoli, F. J.

MRS - Materials Research Society
10 Conference Proceedings Optical Properties of Si Nanocrystals Formed in SiO2 by Ion Implantation

White, C. W., Withrow, S. P., Meldrum, A., Budai, J. D., Hembree, D. M., Zhu, J. G., Henderson, D. O., Prawer, S.

MRS - Materials Research Society
5 Conference Proceedings "Ｃｏｍparative study of the UV-optical and structural properties of SiO2, Al2O3, and HiO2 single layers deposited by reactive evaporation, ion-assisted …

Thielsch,R., Gatto,A., Heber,J., Martin,S., Kaiser,N.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings MECHANICAL PROPERTIES AND RESIDUAL STRESSES IN OXIDE/METAL MULTILAYER FILMS SYNTHESIZED BY ION BEAM ASSISTED DEPOSITION

Kalnas, C. E., Parfitt, L. J., Goldiner, M. G., Was, G. S., Jones, J. W.

MRS - Materials Research Society
6 Conference Proceedings Thermoelectric Properties of SiO₂/SiO₂+Ag Nanolayered Multilayer Films Effected by MeV Si Ions

S. Budak, C. Smith, J. Chacha, M. Pugh, H. Martin, T. Langham, B. Harrell, K. Heidary, R.B. Johnson, Y. Yang, C. …

Materials Research Society
12 Conference Proceedings Ion-assisted deposition of SiO2 film from silicon [5963-67]

Pham, T. H., Dang, Cu. X.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12