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Research of a Novel MEMS Vector Hydrophone Based on a New Package Process

Author(s):
Publication title:
Materials research : eco/enviro[n]mental materials, energy materials, magnesium, aerospace materials and biomaterials for medical application : selected, peer reviewed papers from MRS International Materials Research Conference, June 9-12, 2008, Chongqing, China
Title of ser.:
Materials science forum
Ser. no.:
610-613
Pub. Year:
2009
Pt.:
1
Page(from):
567
Page(to):
572
Pages:
6
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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