Advanced Annealing Schemes for High-Performance SOI Logic Technologies

Advanced Annealing Schemes for High-Performance SOI Logic Technologies

Author(s):: T. Feudel
Publication title:: Rapid thermal processing and beyond : applications in semiconductor processing : special topic volume : selected papers from RTP specialists all over the world, Dornstadt, Germany
Title of ser.:: Materials science forum
Ser. no.:: 573-574
Pub. Year:: 2008
Page(from):: 387
Page(to):: 402
Pages:: 16
Pub. info.:: Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:: 02555476
Language:: English
Call no.:: M23650
Type:: Conference Proceedings

Details

TDL ID:	ZA00054119
Series ID:	PA00000012

Similar Items:

1 Conference Proceedings High Performance Bipolar SOI Technology Ikeda, T., Watanabe, K, Yamaguchi, H, Nishizawa, H., Tamba, N., Usami, M., Natsuaki, N. Electrochemical Society	7 Conference Proceedings High-performance metal-gate SOI CMOS fabricated by ultraclean low-temperature process technologies Ushiki,T., Hirano,Y., Shimada,H., Ohmi,T. SPIE-The International Society for Optical Engineering
2 Conference Proceedings High performance SOI technology for sub-45nm gate length CMOS manufacturing Invited Horstmann, M., Greenlaw, D., Huebler, P., Stephan, R., Feudel, Th., Wei, A., Frohberg, K., Hoentschel, J., Javorka, P., … Electrochemical Society	8 Conference Proceedings Mainstreaming SOI Technology for High Performance CMOS Shahidi, G.G. Electrochemical Society
3 Conference Proceedings Advanced Millisecond Annealing Technologies and its Applications and Concerns on Advanced Logic LSI Fabrication Processes M. Kase, T. Yamamoto, T. Kubo Trans Tech Publications	9 Conference Proceedings Smart Cut Technology: the path for advanced SOI substrates Moriceau, H., Lagahe-Blanchard, C., Fournel, F., Pocas, S., Jalaguier, E., Perreau, P., Deguet, C., Ernst, T., Beaumont, … Kluwer Academic Publishers
4 Conference Proceedings SOI and Low-k in High-Volume Manufacturing Greenlaw, D., Burbach, G., Feudel, T., Feustel, F., Frohberg, K., Graetsch, F., Grasshoff, G., Hartig, C., Hempel, K., … Electrochemical Society	10 Conference Proceedings Advanced Cell Technology for High Performance Li-Al/FeS2 Secondary Batteries Henriksen, G., Kaun, T., Jansen, A., Prakash, J., Vissers, D. Electrochemical Society
5 Conference Proceedings SOI Device Technology for low-power logic and DRAM LSIs Maegawa, S., Ipposhi, T., Yamaguchi, Y., Iwamatsu, T., Maeda, S., Oashi, T., Ueda, K., Shimomura, K., Nishimura, T. Electrochemical Society	11 Conference Proceedings High frequency performances of a SOI technology for low power, low voltage applications Ferlet-Cavrois, V., Marcandella, C., Pelloie, J.L., Raynaud, C., Faynot, O. Electrochemical Society
6 Conference Proceedings High Performance Strained-SOI CMOSFETs* Takagi, S.-I., Mizuno, T., Tezuka, T., Sugiyania, N., Numata, T., Usuda, K., Moriyama, Y., Nakaharai, S., Koga, J., … Electrochemical Society	12 Conference Proceedings High Performance SOI CMOS Technology: FEOL Process, Device, and Material Interactions Mendicino, M. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12