High Temperature RTP Application in SOI Manufacturing

High Temperature RTP Application in SOI Manufacturing

Author(s):

Publication title:

Rapid thermal processing and beyond : applications in semiconductor processing : special topic volume : selected papers from RTP specialists all over the world, Dornstadt, Germany

Title of ser.:

Materials science forum

Ser. no.:

573-574

Pub. Year:

2008

Page(from):

61

Page(to):

76

Pages:

16

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00054119
Series ID:	PA00000012

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