Blank Cover Image

Ultrasonic monitoring of photoresist processing

Author(s):
Publication title:
Metrology, inspection, and process control for microlithography XIII : 15-18 March, 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3677
Pub. Year:
1999
Vol.:
1
Page(from):
340
Page(to):
347
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819431516 [0819431516]
Language:
English
Call no.:
P63600/3677
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Ultrasonic cure and temperature monitoring of photoresist during the pre-exposure bake process

Morton,S.L., Degertekin,F.L., Khuri-Yakub,B.T.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings A New Flexible Rapid Thermal Processing System

Saraswat, K. C., Chen, Y., Degertekin, L., Khuri-Yakub, B. T.

MRS - Materials Research Society
2 Conference Proceedings Erosion/corrosion monitoring with dry-contact ultrasonic Lamb-wave transducers

Pei,J., Degertekin,F.L., Honein,B.V., Khuri-Yakub,B.T.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings A Novel Technique for In Situ Monitoring of Crystallinity and Temperature During Rapid Thermal Annealing of Thin Si/Si-Ge Films on Quartz/Glass

Subramanian, V., Degertekin, F. L., Dankoski, P., Khuri-Yakub, B. T., Saraswat, K. C.

MRS - Materials Research Society
3 Conference Proceedings Micromachined capacitive immersion ultrasonic transducers

Khuri-Yakub,B.T., Jin,X.C., Ladabaum,I., Degertekin,F.L.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Micromachined 2-D Array Piezoelectrically Actuated Flextensional Transducers and Inkjet Print Heads

Percin, Goekhan, Khuri-Yakub, Butrus T.

Electrochemical Society
4 Conference Proceedings Micromachined ultrasonic transducers for air-coupled nondestructive evaluation

Hansen,S.T., Degertekin,F.L., Khuri-Yakub,B.T.

SPIE - The International Society for Optical Engineering
10 Conference Proceedings Control of a drop ejector used as a photoresist dispenser

Roche,P.-E., Hansson,A., Khuri-Yakub,B.T.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings In-situ simultaneous measurement of temperature and thin film thickness with ultrasonic techniques

Khuri-Yakub,B.T., Pei,J., Degertekin,F.L., Saraswat,K.C.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Beamforming and hardware design for a multichannel front-end integrated circuit for realtime 3D catheter-based ultrasonic imaging [6147-36]

Wygant, I. O., Karaman, M., Oralkan, O, Khuri-Yakub, B. T

SPIE - The International Society of Optical Engineering
6 Conference Proceedings A New Flexible Rapid Thermal Processing System

Saraswat, K. C., Chen, Y., Degertekin, L., Khuri-Yakub, B. T.

MRS - Materials Research Society
12 Conference Proceedings Ultrasonic temperature control and measurement in microfluidic channels

Jagannathan, H., Yaralioglu, G.G., Ergun, A.S., Khuri-Yakub, B.T.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12