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High Resolution Position Monitoring of Suspended MEMS towards Biological and Chemical Sensors

Author(s):
Publication title:
Micro- and nanoscale systems - novel materials, structures and devices : symposium held December 1-6, 2013, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1659
Pub. Year:
2014
Page(from):
9
Page(to):
14
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605116365 [160511636X]
Language:
English
Call no.:
M23500/1659
Type:
Conference Proceedings

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